The Model 622-Xe is a lower cost version of our Model 622-X modular design.  Our sales price has been reduced  to below $20K by not including in the price a vibration isolation table, a stand to hold the profiler interferometer cross, and a means of holding and positioning the sample being tested....all items we have found many of our customers and potential customers already have available in their facilities. As with our other models, the profiler is based on patented long working-distance interference microscope technology that has been licensed for commercialization. This instrument is suitable for three-dimensional imaging and metrology of micro-electro-mechanical (MEMS) devices and test structures. The long working-distance allows standard probes or probe cards to be used and provides the ability to make measurements through windows.  This enables nanometer-scale 3-D height profiles of MEMS test structures to be acquired across an entire wafer with optional long travel sample stages.

The standard light source is a green incoherent light emitting diode (LED).  The standard video camera is a  1/2-inch monochrome firewire camera.  The image processing system consists of a National Instruments NI-IMAQ Vision Acquisition Software and an IEEE-1394 Firewire board.  A National Instruments analog output board provides the outputs for the control of the instrument as well as the control of micro-devices under test.  A Dell computer with monitor and keyboard is provided.

                                                                                                                       Interferometer Cross

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MEMScript^TM Interpretive Scripting Environment Software

MEMScript^TM software, which is an interpretive scripting environment will be provided.  The MEMScript^TM Software has several unique features.  In addition to analysis features, MEMScript ^TM also has the ability to control MEMS devices and make real time measurements of performance.  Important MEMScript^TM functions include:

• Pattern matching using sub-pixel interpolation

• Phase shifting interferometry (PSI)

• Arbitrary waveform output (up to 1 million samples per second for 8 channels)

• Decision making capability (full logical branching)

• Stroboscopic imaging capabilities

• Concise user interface

• Light source brightness auto-setting

• GPIB capabilities to interface with external equipment

• Serial port capabilities to interface with external equipment

A number of higher level macros, which serve as both example code and as useful libraries, are also furnished with the software.

Download Model 622-Xe / MEMScript^TM Data Sheet