The Model 622-X is a modular design, based on patented long working-distance interference microscope technology, that allows the profiler to be built into custom or user furnished setups. This instrument is suitable for three-dimensional imaging and metrology of micro-electro-mechanical (MEMS) devices and test structures. The long working-distance allows standard probes or probe cards to be used and provides the ability to make measurements through windows.  This enables nanometer-scale 3-D height profiles of MEMS test structures to be acquired across an entire wafer with optional long travel sample stages.

The standard light source is a green incoherent light emitting diode (LED).  The standard video camera is a  2/3-inch black & white CCD camera.  The image processing system consists of a National Instruments analog output board, an IMAQ Vision Deploy Engine and an IMAQ PCI-1409 and NI-IMAQA.  A computer with monitor and keyboard is provided as well as a second monitor to view the video output from the camera.

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MEMScript^TM Interpretive Scripting Environment Software

MEMScript^TM software, which is an interpretive scripting environment will be provided.  The MEMScript^TM Software has several unique features.  In addition to analysis features, MEMScript ^TM also has the ability to control MEMS devices and make real time measurements of performance.  Important MEMScript^TM functions include:

• Pattern matching using sub-pixel interpolation

• Phase shifting interferometry (PSI)

• Arbitrary waveform output (up to 1 million samples per second for 8 channels)

• Decision making capability (full logical branching)

• Stroboscopic imaging capabilities

• Concise user interface

• Light source brightness auto-setting

• GPIB capabilities to interface with external equipment

• Serial port capabilities to interface with external equipment

A number of higher level macros, which serve as both example code and as useful libraries, are also furnished with the software.

Download Model 622-X / MEMScript^TM Data Sheet