The Model 622-EDU is a low-cost, turn-key, long working-distance 3D MEMS profiler based on patented long working-distance interference microscope technology.  This instrument is suitable for three-dimensional imaging and metrology of micro-electro-mechanical (MEMS) devices and test structures and includes a custom micro-electronics probe station.  The long working-distance allows standard probes or probe cards to be used.  This enables nanometer-scale 3-D height profiles of MEMS test structures to be acquired across an entire wafer with optional long travel sample stages.

The instrument is supported by an optical breadboard and comes with one left hand, vacuum base probe micropositioner and one right-hand, vacuum base probe micropositioner.  The standard light source is a green incoherent light emitting diode (LED).  The standard video camera is a  1/2-inch black & white CCD camera.  The image processing system consists of a National Instruments analog output board, an IMAQ Vision Deploy Engine and an IMAQ PCI-1409 and NI-IMAQA.  A computer with monitor and keyboard is provided as well.

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MEMScript^TM Interpretive Scripting Environment Software

MEMScript^TM software, which is an interpretive scripting environment will be provided.  The MEMScript^TM Software has several unique features.  In addition to analysis features, MEMScript ^TM also has the ability to control MEMS devices and make real time measurements of performance.  Important MEMScript^TM functions include:

• Pattern matching using sub-pixel interpolation

• Phase shifting interferometry (PSI)

• Arbitrary waveform output (up to 1 million samples per second for 8 channels)

• Decision making capability (full logical branching)

• Stroboscopic imaging capabilities

• Concise user interface

• Light source brightness auto-setting

• GPIB capabilities to interface with external equipment

• Serial port capabilities to interface with external equipment

A number of higher level macros, which serve as both example code and as useful libraries, are also furnished with the software.

Download Model 622-EDU / MEMScript^TM Data Sheet