Standard and Custom Long Working Distance
Interference Microscopes for Dynamic
3D Measurements of MEMS Devices
E M Optomechanical, Inc. (EMOpto) is a supplier of several models of Long Working Distance Interference Microscopes, also known as Optical Profilers, for nano-scale measurements of MEMS Devices for the nano-technology and microsystems industries.
Based in Mesa, Arizona, EMOpto is in the unique position of providing the rapidly growing, multi-billion dollar MEMS/nanotechnology/ microsystems markets with a much needed metrology instrument.
Traditional optical profilers were designed for applications other than microsystems. Their very short working distances make getting the electrical probes needed to connect to microsystem devices always difficult and often impossible. Based on patented long working distance optical profiler technology, developed by Sandia National Laboratories and licensed exclusively to EMOpto, the OptoPro line of productswere designed to solve this problem. Not only does it solve the working distance problem, it also includes copyrighted MEMScript software which provides the ability to control microsystems devices and make real time measurements of performance.
Based in Mesa, Arizona, EMOpto is in the unique position of providing the rapidly growing, multi-billion dollar MEMS/nanotechnology/ microsystems markets with a much needed metrology instrument.
Traditional optical profilers were designed for applications other than microsystems. Their very short working distances make getting the electrical probes needed to connect to microsystem devices always difficult and often impossible. Based on patented long working distance optical profiler technology, developed by Sandia National Laboratories and licensed exclusively to EMOpto, the OptoPro line of productswere designed to solve this problem. Not only does it solve the working distance problem, it also includes copyrighted MEMScript software which provides the ability to control microsystems devices and make real time measurements of performance.
Long Working Distance
EMOpto’s OptoPro product line of long working distance Optical Profilers are unparalleled in their ability to provide plenty of working space which is essential for microsystems measurement and testing. EMOpto's long working-distance 3D MEMS Optopro optical profilers are based on patented long working-distance interference microscope technology. These instruments are suitable for three-dimensional imaging and metrology of micro-electro-mechanical (MEMS) devices and test structures and includes a custom micro-electronics probe station.
The long working-distance, coupled with the patented optical design that uses standard long working distance microscope objectives allows measurements to be easily made through windows.
There is plenty of space for standard electrical probes or probe cards as well..
The long working-distance, coupled with the patented optical design that uses standard long working distance microscope objectives allows measurements to be easily made through windows.
There is plenty of space for standard electrical probes or probe cards as well..
MEMScript TM Software
All models are furnished with MEMScriptTM Interpretive Scripting Environment Software which is an interpretive scripting environment. The MEMScriptTM Software has several unique features. In addition to analysis features, MEMScript TM also has the ability to control MEMS devices and make real time measurements of performance. Important MEMScriptTM functions include:
- Pattern matching using sub-pixel interpolation
- Phase shifting interferometry (PS)
- Arbitrary waveform output (up to 8 channels)
- Decision making capability (full logic branching)
- Stroboscopic imaging capabilities
- Concise user interface
- Light source brightness auto-setting
- GPIB capabilities to interface with external equipment
- Serial port capabilities to interface with external equipment
- Pattern matching using sub-pixel interpolation
- Phase shifting interferometry (PS)
- Arbitrary waveform output (up to 8 channels)
- Decision making capability (full logic branching)
- Stroboscopic imaging capabilities
- Concise user interface
- Light source brightness auto-setting
- GPIB capabilities to interface with external equipment
- Serial port capabilities to interface with external equipment
Voltage Amplifiers
The SNL-KP24W Model 422 High Power/High Frequency Amplifier is based on technology developed at and licensed from Sandia National Laboratories exclusively for E M Optomechanical (EMOpto). Its function is to amplify low voltages from function generators or computer/control system analog outputs, which are typically in the range of 0-10 vdc, up to voltages in the range of a few hundred volts typically necessary to operate Micro-Electro Mechanical Systems (MEMS) devices. There is nothing faster.
"MEMScriptTM" is a trademark of Sandia Corporation in the United States. Used with the permission of Sandia Corporation.